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Spectral diagnostics of inductively coupled RF discharge plasma

✍ Scribed by I. Sh. Abdullin, A. N. Bykanov, I. G. Gafarov, O. E. Ibragimov, R. F. Sharafeev

Book ID: 114989102
Publisher: SP MAIK Nauka/Interperiodica
Year: 2012
Tongue: English
Weight: 221 KB
Volume: 46
Category: Article
ISSN: 0018-1439
DOI: 10.1134/s0018143912040029

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