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Improved RF-driven probe method for RF discharge plasma diagnostics

โœ Scribed by Ohsawa, A; Ohuchi, M; Kubota, T

Book ID
121497416
Publisher
Institute of Physics
Year
1991
Tongue
English
Weight
366 KB
Volume
2
Category
Article
ISSN
0957-0233

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In this paper, we report on numerical solutions and model reduction results for a plasma glow discharge model with a radio frequency ionization source. A pseudospectral implementation of a global spectral method was found to give accurate simulation results that correctly reflected the expected phys