[IEEE 2011 IEEE 38th International Conference on Plasma Sciences (ICOPS) - Chicago, IL, USA (2011.06.26-2011.06.30)] 2011 Abstracts IEEE International Conference on Plasma Science - Probe diagnostics of RF plasmas for material processing

[IEEE 2011 IEEE 38th International Confe

✍ Laroussi, M.; Karakas, E.; Akman, M. A. 📂 Article 📅 2011 🏛 IEEE ⚖ 47 KB

[IEEE 2011 IEEE 38th International Confe

✍ Nguyen, Khanh; Abe, David K.; Wright, Edward; Ludeking, Lars; Pershing, Dean; Pa 📂 Article 📅 2011 🏛 IEEE ⚖ 52 KB

[IEEE 2011 IEEE 38th International Confe

✍ Takamatsu, Toshihiro; Ichikawa, Masaki; Hirai, Hideyuki; Sasaki, Ryota; Shibata, 📂 Article 📅 2011 🏛 IEEE ⚖ 45 KB

[IEEE 2011 IEEE 38th International Confe

✍ Kim, Y. H.; Rhim, H. S.; Uhm, H. S.; Choi, E. H. 📂 Article 📅 2011 🏛 IEEE ⚖ 76 KB

[IEEE 2011 IEEE 38th International Confe

✍ Cooke, S. J.; Levush, B.; Chernyavskiy, I. A.; Antonsen, T. M. 📂 Article 📅 2011 🏛 IEEE ⚖ 54 KB

[IEEE 2011 IEEE 38th International Confe

✍ Basten, M.A.; Tucek, J.C.; Gallagher, D.A.; Kreischer, K.E. 📂 Article 📅 2011 🏛 IEEE ⚖ 48 KB