✦ LIBER ✦
Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas
✍ Scribed by Oh, Se-Jin; Choi, Ik-Jin; Kim, Jin-Yong; Chung, Chin-Wook
- Book ID
- 119969167
- Publisher
- Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 552 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0957-0233
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