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A turbulent flow model for the rf inductively coupled plasma

✍ Scribed by El-Hage, M.; Mostaghimi, J.; Boulos, M. I.

Book ID: 121809199
Publisher: American Institute of Physics
Year: 1989
Tongue: English
Weight: 866 KB
Volume: 65
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.343297

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