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RF power dependence of refractive index of room temperature sputtered ZnO:Al thin films

✍ Scribed by Bhaskar Chandra Mohanty, Deuk Ho Yeon, Jae Ho Yun, Jun Sik Cho…

Book ID
120782825
Publisher
Springer
Year
2013
Tongue
English
Weight
487 KB
Volume
115
Category
Article
ISSN
1432-0630

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## Abstract Transparent conducting, aluminium doped zinc oxide thin films (ZnO:Al) were deposited by radio frequency (RF) magnetron sputtering. The RF power was varied from 60 to 350 W whereas the substrate temperature was kept at 160 °C. The structural, electrical and optical properties of the as‐