✦ LIBER ✦

Rf multipolar plasma for broad and reactive ion beams

✍ Scribed by C Lejeune; JP Grandchamp; O Kessi; JP Gilles

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Rf-broad-beam ion source for reactive sp

✍ R Lossy; J Engemann 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 299 KB

Triplasmatron sources for broad and reac

✍ C Lejeune; JP Grandchamp; O Kessi; JP Gilles 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 444 KB

Mass-spectrometric ion sampling from rea

✍ M.J. Vasile; G. Smolinsky 📂 Article 📅 1973 🏛 Elsevier Science ⚖ 1013 KB

Broad Beam Ion Sources for Electrostatic

✍ H. Neumann; M. Tartz; F. Scholze; T. Chassé; H. Kersten; H. Leiter 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 395 KB

Characterization of reactive broad beam

📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 146 KB

Argon and reactive ion beam etching for

📂 Article 📅 1984 🏛 Elsevier Science 🌐 English ⚖ 67 KB