Mass-spectrometric ion sampling from reactive plasmas I. Apparatus for argon and reactive discharges

✍ Scribed by M.J. Vasile; G. Smolinsky

• Publisher: Elsevier Science
• Year: 1973
• Weight: 1013 KB
• Volume: 12
• Category: Article
• ISSN: 0020-7381
• DOI: 10.1016/0020-7381(73)80096-8