✦ LIBER ✦
Characterization of reactive broad beam radio-frequency ion source: R Lossy and J Engemann, J Vac Sci Technol, B6, 1988, 284–287
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 146 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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