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RF heating of the conductor film on silicon substrate for thin film formation

✍ Scribed by M. Sinder; J. Pelleg; V. Meerovich; V. Sokolovsky

Book ID: 108466972
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 120 KB
Volume: 302
Category: Article
ISSN: 0921-5093
DOI: 10.1016/s0921-5093(00)01350-2

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## Abstract Thin‐films of Ni__~x~__ Zn~1–__x__~ Fe~2~O~4~ [(Ni,Zn)‐ferrite] are grown by means of RF sputtering on Si(100) and (111) substrates, corresponding to the orientation of Si cantilevers for AFM/MFM measurements. We find that the ferrite can be sputtered directly onto the Si surfaces, but