Heat explosion approach to radiofrequency heating of a conductor film on silicon substrate: Application for silicide film formation

✍ Scribed by J. Pelleg; S. Rosenberg; M. Sinder

• Book ID: 108050200
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 711 KB
• Volume: 59
• Category: Article
• ISSN: 1359-6454
• DOI: 10.1016/j.actamat.2011.03.052