Residual impurities and native defects in 6H-SiC bulk crystals grown by halide chemical-vapor deposition

✍ Scribed by Huh, S. W.; Chung, H. J.; Nigam, S.; Polyakov, A. Y.; Li, Q.; Skowronski, M.; Glaser, E. R.; Carlos, W. E.; Shanabrook, B. V.; Fanton, M. A.; Smirnov, N. B.

• Book ID: 120496037
• Publisher: American Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 402 KB
• Volume: 99
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2150593