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Research on digital mask fabrication technique of micro-optical element

✍ Scribed by Gao, Yiqing; Luo, Ningning; Chen, Tingzheng; Chen, Min

Book ID: 115453519
Publisher: Taylor and Francis Group
Year: 2009
Tongue: English
Weight: 791 KB
Volume: 56
Category: Article
ISSN: 0950-0340
DOI: 10.1080/09500340600911891

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