SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Lithographic and Micromachining Techniques for Optical Component Fabrication - Requirements and approaches to adapting laser writers for fabrication of gray-scale masks

✍ Scribed by Korolkov, Victor P.; Shimansky, Ruslan; Poleshchuk, Alexander G.; Cherkashin, Vadim V.; Kharissov, Andrey A.; Denk, Dmitry; Kley, Ernst-Bernhard; Herzig, Hans Peter

• Book ID: 120411808
• Publisher: SPIE
• Year: 2001
• Weight: 253 KB
• Volume: 4440
• Category: Article
• DOI: 10.1117/12.448047