Cost-effective mass fabrication of multilevel diffractive optical elements by use of a single optical exposure with a gray-scale mask on high-energy beam-sensitive glass

✍ Scribed by Däschner, Walter ;Long, Pin ;Stein, Robert ;Wu, Chuck ;Lee, S. H.

• Book ID: 115346154
• Publisher: The Optical Society
• Year: 1997
• Tongue: English
• Weight: 718 KB
• Volume: 36
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.36.004675