Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam?sensitive gray-scale mask

✍ Scribed by Xiao Cong Yuan; W. Yu; N. Ngo; W. Cheong

• Book ID: 115403501
• Publisher: Optical Society of America
• Year: 2002
• Tongue: English
• Weight: 115 KB
• Volume: 10
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.10.000303