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Reliability studies of narrow Cu lines

✍ Scribed by Günther Schindler; Sabine Penka; Gernot Steinlesberger; Martin Traving; Werner Steinhögl; Manfred Engelhardt

Book ID: 108207514
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 255 KB
Volume: 82
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.07.069

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