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Stress migration risk on electromigration reliability in advanced narrow line copper interconnects

✍ Scribed by Heryanto, A.; Pey, K. L.; Lim, Y. K.; Raghavan, N.; Liu, W.; Wei, J.; Gan, C. L.; Tan, J. B.


Book ID
111871371
Publisher
American Institute of Physics
Year
2011
Tongue
English
Weight
838 KB
Volume
110
Category
Article
ISSN
0021-8979

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