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Reliability of in-situ rapid thermal gate dielectrics in deep submicrometer MOSFET's

✍ Scribed by Zhang, K.X.; Osburn, C.M.

Book ID: 114536383
Publisher: IEEE
Year: 1995
Tongue: English
Weight: 845 KB
Volume: 42
Category: Article
ISSN: 0018-9383
DOI: 10.1109/16.477777

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