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Relative atomic chlorine density in inductively coupled plasmas containing chlorine and boron trichloride

✍ Scribed by Hebner, G. A.; Fleddermann, C. B.

Book ID: 121343764
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 280 KB
Volume: 83
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.367327

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