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Measurements of relative BCl density in BCl[sub 3]-containing inductively coupled radio frequency plasmas

✍ Scribed by Fleddermann, C. B.; Hebner, G. A.

Book ID: 121343762
Publisher: American Institute of Physics
Year: 1998
Tongue: English
Weight: 307 KB
Volume: 83
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.367158

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