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Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas

โœ Scribed by Corr, C S; Despiau-Pujo, E; Chabert, P; Graham, W G; Marro, F G; Graves, D B


Book ID
125526669
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
255 KB
Volume
41
Category
Article
ISSN
0022-3727

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