Frequency effects in capacitively coupled radio-frequency glow discharges: a comparison between a 2-D fluid model and experiments

✍ Scribed by Goedheer, W.J.; Meijer, P.M.; Bezemer, J.; Diederick, J.; Passchier, J.D.P.; van Sark, W.G.J.H.M.

• Book ID: 117862647
• Publisher: IEEE
• Year: 1995
• Tongue: English
• Weight: 604 KB
• Volume: 23
• Category: Article
• ISSN: 0093-3813
• DOI: 10.1109/27.467986