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Regularities in the formation of dislocation networks on the boundary of bonded Si(001) wafers

✍ Scribed by V. I. Vdovin, E. V. Ubyivovk, O. F. Vyvenko

Book ID: 120808699
Publisher: Springer
Year: 2013
Tongue: English
Weight: 544 KB
Volume: 47
Category: Article
ISSN: 1063-7826
DOI: 10.1134/S106378261302022X

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