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Regrowth and strain recovery of Sb implanted Si1−xGex strained layers

✍ Scribed by Z. Atzmon; M. Eizenberg; E. Zolotoyabko; Stella Q. Hong; J.W. Mayer; F. Schäffler


Book ID
113283484
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
320 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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