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Refractive index behavior of boron-doped silica films by plasma-enhanced chemical vapor deposition

✍ Scribed by R.H. Horng; F. Chen; D.S. Wuu; T.Y. Lin


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
274 KB
Volume
92
Category
Article
ISSN
0169-4332

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The interface structure in copolymer films made using plasma enhanced chemical vapor deposition (PECVD) has been probed for the first time using X-ray reflectivity. Copolymer films made from comonomers benzene (B), octafluorocyclobutane (OFCB), and hexamethyldisiloxane (HMDS) show extremely sharp in