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Preparation of SixCyHz films from methylsilane by plasma-enhanced chemical vapor deposition

✍ Scribed by M.P. Delplancke; J.M. Powers; G.J. Vandentop; G.A. Somorjai

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 494 KB
Volume: 202
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(91)90100-c

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