Reflection electron microscopy observation of formation process of palladium silicide islands on silicon (111) surface

✍ Scribed by Masaki Takeguchi; Miyoko Tanaka; Hidehiro Yasuda; Kazuo Furuya

• Book ID: 114386429
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 286 KB
• Volume: 44
• Category: Article
• ISSN: 1359-6462
• DOI: 10.1016/s1359-6462(01)00775-8