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Image contrast of dislocations and atomic steps on (111) silicon surface in reflection electron microscopy

โœ Scribed by Nobuyuki Osakabe; Yasumasa Tanishiro; Katsumichi Yagi; Goro Honjo


Publisher
Elsevier Science
Year
1981
Weight
61 KB
Volume
102
Category
Article
ISSN
0167-2584

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Two beam interferences produced using an electrostatic biprism, which is inserted in the position of the selected area diaphragm of a commercial electron microscope, may be used in reflection electron microscopy to determine the phase shifts induced by structures on single crystal surfaces. A descri