UHV-SEM observations of cleaning process and step formation on silicon (111) surfaces by annealing

✍ Scribed by Y. Ishikawa; N. Ikeda; M. Kenmochi; T. Ichinokawa

• Book ID: 104194043
• Publisher: Elsevier Science
• Year: 1985
• Weight: 52 KB
• Volume: 159
• Category: Article
• ISSN: 0167-2584
• DOI: 10.1016/0167-2584(85)91246-0