UHV-SEM observations of cleaning process and step formation on silicon (111) surfaces by annealing

✍ Scribed by Y Ishikawa; N Ikeda; M Kenmochi; T Ichinokawa

• Book ID: 118985885
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 876 KB
• Volume: 159
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(85)90115-3