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Reduction of internal stress in sputter-deposited films by energetic ion bombardment

✍ Scribed by Nowak, R.; Horino, Y.; Ando, Y.; Maruno, S.


Book ID
121466502
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
263 KB
Volume
68
Category
Article
ISSN
0003-6951

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