Post-deposition reduction of internal stress in thin films: The case of HfN coatings bombarded with Au ions

✍ Scribed by R. Nowak; Y. Miyagawa; C.L. Li; S. Nakao; S. Maruno; S. Miyagawa

• Book ID: 117358273
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 508 KB
• Volume: 33
• Category: Article
• ISSN: 0167-577X
• DOI: 10.1016/s0167-577x(97)00066-9