✦ LIBER ✦

Post-deposition relaxation of internal stress in sputter-grown HfN thin films bombarded with carbon ions

✍ Scribed by R Nowak; F Yoshida; Y Miyagawa; S Miyagawa

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Post-deposition reduction of internal st

✍ R. Nowak; Y. Miyagawa; C.L. Li; S. Nakao; S. Maruno; S. Miyagawa 📂 Article 📅 1997 🏛 Elsevier Science 🌐 English ⚖ 508 KB

Reduction of internal stress in sputter-

✍ Nowak, R.; Horino, Y.; Ando, Y.; Maruno, S. 📂 Article 📅 1996 🏛 American Institute of Physics 🌐 English ⚖ 263 KB