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Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

✍ Scribed by H. T. Banks, S. C. Beeler, G. M. Kepler and H. T. Tran

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Reduced Order Modeling and Control of Th

✍ Kepler, G. M.; Banks, H. T.; Tran, H. T.; Beeler, S. C. 📂 Article 📅 2002 🏛 Society for Industrial and Applied Mathematics 🌐 English ⚖ 370 KB

Reduced order model compensator control

✍ G. M. Kepler; H. T. Tran; H. T. Banks 📂 Article 📅 2000 🏛 John Wiley and Sons 🌐 English ⚖ 167 KB

Feedback control of growth rate and surf

✍ Yiming Lou; Panagiotis D. Christofides 📂 Article 📅 2003 🏛 American Institute of Chemical Engineers 🌐 English ⚖ 470 KB 👁 1 views

The control of thin film deposition and

✍ Barber, Zoe H. 📂 Article 📅 2006 🏛 Royal Society of Chemistry 🌐 English ⚖ 626 KB

Modeling and measurement of monomer pres

✍ Shepsis, L.V.; Pedrow, P.D.; Mahalingam, R.; Osman, M.A. 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 165 KB

Epitaxial growth and control of the sodi

✍ Hildebrandt, Sandra; Komissinskiy, Philipp; Major, Marton; Donner, Wolfgang; Alf 📂 Article 📅 2013 🏛 Elsevier Science 🌐 English ⚖ 650 KB