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Reduced order model compensator control of species transport in a CVD reactor

✍ Scribed by G. M. Kepler; H. T. Tran; H. T. Banks

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A comparison of full non-linear and redu

✍ C. B. Allen; N. V. Taylor; C. L. Fenwick; A. L. Gaitonde; D. P. Jones 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 180 KB