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Feedback control of growth rate and surface roughness in thin film growth

✍ Scribed by Yiming Lou; Panagiotis D. Christofides

Publisher: American Institute of Chemical Engineers
Year: 2003
Tongue: English
Weight: 470 KB
Volume: 49
Category: Article
ISSN: 0001-1541
DOI: 10.1002/aic.690490818

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