𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Recent progress in cell-projection electron-beam lithography

✍ Scribed by Y Sohda; H Ohta; F Murai; J Yamamoto; H Kawano; H Satoh; H Itoh


Book ID
114155505
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
903 KB
Volume
67-68
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Progress in EB-cell projection lithograp
✍ N. Saitou; S. Moriyama; S. Okazaki; G. Matsuoka; F. Murai; Y. Sakitani; H. Yoda; πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 206 KB
Progress in ion projection lithography
✍ A. Chalupka; J. Fegerl; R. Fischer; G. Lammer; H. LΓΆschner; L. Malek; R. Nowak; πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 868 KB