✦ LIBER ✦

Progress and challenges in electron beam lithography

✍ Scribed by H.C. Pfeiffer

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 36 KB
Volume: 9
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(89)90042-7

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