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Real time spectroscopic ellipsometry for characterization of thin film optical properties and microstructural evolution

✍ Scribed by R.W. Collins; Ilsin An; H.V. Nguyen; T. Gu

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 840 KB
Volume: 206
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(91)90454-6

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