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Real time spectroscopic ellipsometry for characterization of the crystallization of amorphous silicon by thermal annealing

✍ Scribed by M. Wakagi; H. Fujiwara; R.W. Collins

Book ID: 114086356
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 196 KB
Volume: 313-314
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(97)00865-1

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