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Real-time spectroscopic ellipsometry for determination of the optical functions of ion-beam-deposited hydrogenated amorphous carbon

✍ Scribed by Y. Cong; I. An; R.W. Collins; K. Vedam; H.S. Witham; L.J. Pilione; R. Messier


Book ID
114085813
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
746 KB
Volume
193-194
Category
Article
ISSN
0040-6090

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