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Real-Time Monitoring and Growth Control of Si-Gradient-Index Structures by Multiwavelength Ellipsometry

✍ Scribed by Kildemo, M.

Book ID: 115346737
Publisher: The Optical Society
Year: 1998
Tongue: English
Weight: 255 KB
Volume: 37
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.37.000113

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## Abstract Silicon‐germanium (Si~1−__x__~ Ge__~x~__:H) thin films have been prepared by plasma enhanced chemical vapor deposition of SiH~4~ and GeH~4~ and measured during growth using real time spectroscopic ellipsometry. A two‐layer virtual interface analysis has been applied to study the structu