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Real time control of reactive magnetron-sputter deposited optical filters by in situ spectroscopic ellipsometry

✍ Scribed by M Vergöhl; N Malkomes; T Matthée; G Bräuer

Book ID: 114085306
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 190 KB
Volume: 377-378
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(00)01382-1

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