✦ LIBER ✦

Reactively sputtered tantalum pentoxide thin films for integrated capacitors

✍ Scribed by T Riekkinen; J Molarius

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thin-film capacitors using tantalum oxid

✍ P. Lloyd 📂 Article 📅 1961 🏛 Elsevier Science 🌐 English ⚖ 117 KB

Reactive D.C. sputtering with the magnet

✍ S. Schiller; U. Heisig; K. Steinfelder; J. Strümpfel 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 355 KB

Properties of thin film capacitors made

✍ P.K. Reddy; G.K. Bhagavat; S.R. Jawalekar 📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 389 KB

XPS study for reactively sputtered titan

✍ Ning Jiang; H.J. Zhang; S.N. Bao; Y.G. Shen; Z.F. Zhou 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 358 KB

Spectroscopic investigation of tantalum

✍ S Dontchev; P Georgiev; K Gerassimova; J Kourtev 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 296 KB

Radiofrequency reactive sputtering for d

✍ J. Duchêne 📂 Article 📅 1971 🏛 Elsevier Science 🌐 English ⚖ 490 KB