Reactive D.C. sputtering with the magnetron-plasmatron for tantalum pentoxide and titanium dioxide films

✍ Scribed by S. Schiller; U. Heisig; K. Steinfelder; J. Strümpfel

• Book ID: 107862568
• Publisher: Elsevier Science
• Year: 1979
• Tongue: English
• Weight: 355 KB
• Volume: 63
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(79)90042-7