✦ LIBER ✦
XPS study for reactively sputtered titanium nitride thin films deposited under different substrate bias
✍ Scribed by Ning Jiang; H.J. Zhang; S.N. Bao; Y.G. Shen; Z.F. Zhou
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 358 KB
- Volume
- 352
- Category
- Article
- ISSN
- 0921-4526
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