Reactive Sputtering Deposition of Perovskite Oxide and Oxynitride Lanthanum Titanium Films: Structural and Dielectric Characterization

✍ Scribed by Lu, Yu; Le Paven, Claire; Nguyen, Hung V.; Benzerga, Ratiba; Le Gendre, Laurent; Rioual, Stéphane; Tessier, Franck; Cheviré, François; Sharaiha, Ala; Delaveaud, Christophe; Castel, Xavier

• Book ID: 127262256
• Publisher: American Chemical Society
• Year: 2013
• Tongue: English
• Weight: 461 KB
• Volume: 13
• Category: Article
• ISSN: 1528-7483
• DOI: 10.1021/cg4010196