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dc reactive magnetron sputtering of titanium-structural and optical characterization of TiO2 films

✍ Scribed by Suhail, M. H.; Rao, G. Mohan; Mohan, S.

Book ID: 120388295
Publisher: American Institute of Physics
Year: 1992
Tongue: English
Weight: 987 KB
Volume: 71
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.351264

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