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Reactive ion etching of waveguide structures in diamond

✍ Scribed by Hiscocks, Mark P.; Kaalund, Christopher J.; Ladouceur, François; Huntington, Shane T.; Gibson, Brant C.; Trpkovski, Steven; Simpson, David; Ampem-Lassen, Eric; Prawer, Steven; Butler, James E.

Book ID: 121506089
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 753 KB
Volume: 17
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2008.04.019

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